METHOD AND DEVICE FOR OPERATING A LIQUID METAL-ION SOURCE OR LIQUID METAL ELECTRON SOURCE AS WELL AS A LIQUID METAL-ION SOURCE OR LIQUID METAL ELECTRON SOURCE
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United States of America
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Dec 9, 2021
app pub date -
Jun 4, 2021
filing date -
Jun 4, 2021
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Abstract
The invention relates to a liquid metal-ion beam system (1) or liquid metal electron beam system, comprising:
- a conductive emitter electrode (2),a conductive extractor electrode (3) opposite to the emitter electrode (2),a liquid metal reservoir (4) which is fluidically connected to the emitter electrode (2) for transporting liquid metal to the emitter electrode (2),a control unit (5) which is configured to apply a periodically varying operating voltage between emitter electrode (2) and extractor electrode (3).
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