MEMS ULTRASONIC TRANSDUCER
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United States of America Patent
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Issued Date -
Dec 2, 2021
app pub date -
Jul 28, 2017
filing date -
Jul 28, 2017
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Abstract
An ultrasonic device includes a substrate, a transmitter disposed over the substrate, the transmitter including an ultrasonic transmitting transducer configured to generate ultrasonic signals, and a receiver disposed over the substrate, the receiver including an ultrasonic receiving transducer configured to sense ultrasonic signals. The ultrasonic device further includes a first horn-shaped acoustic channel, wherein a material of at least one portion of the first horn-shaped acoustic channel is the same as a material of at least one portion of the transmitter or the receiver.
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