GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
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United States of America Patent
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Nov 25, 2021
app pub date -
Aug 10, 2021
filing date -
Mar 27, 2019
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Abstract
A gas laser apparatus may include a chamber filled with a laser gas; a window provided in the chamber and through which a laser beam passes; an optical path tube connected to the chamber to surround a position of the window in the chamber; a heated gas supply port configured to supply a heated purge gas into a closed space including a space in the optical path tube; and an exhaust port configured to exhaust a gas in the closed space.
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