Surface analysis device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11499989
APP PUB NO 20210349125A1
SERIAL NO

17283886

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A surface analysis device is provided with a sample stage for placing a sample thereon, a cantilever to be arranged to face the sample stage, and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to a measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the stage in a direction intersecting with the first direction.

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Patent Owner(s)

Patent OwnerAddress
SHIMADZU CORPORATION1 NISHINOKYO KUWABARA-CHO NAKAGYO-KU KYOTO-SHI KYOTO 604-8511

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirade, Masato Kyoto, JP 19 16
Kobayashi, Kanji Kyoto, JP 17 141

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