LIQUID PRECURSOR BUBBLER
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United States of America Patent
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Issued Date -
Nov 11, 2021
app pub date -
Aug 24, 2020
filing date -
May 7, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
One or more techniques and/or systems are disclosed for saturating a gas with a liquid-borne compound. A bubbler container may be configured to contain a carrier liquid, which comprises a desired compound. The container may comprise at least one channeling plane, disposed between the top and bottom of the container, which may be configured to allow gas bubbles to travel through a circuitous, channeling route. The gas can be introduced to the container at a bottom portion of the container, into the carrier liquid comprising the compound. Carrier gas bubbles formed in the liquid may be forced to travel the channeling route to a top portion of the container, where gas saturated with the compound may be collected.
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