Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device
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United States of America Patent
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Feb 21, 2023
Grant Date -
Oct 28, 2021
app pub date -
Jul 9, 2021
filing date -
Feb 26, 2019
priority date (Note) -
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Abstract
A laser chamber apparatus may include a pipe, an inner electrode extending along a longitudinal direction of the pipe and disposed in a through hole in the pipe, an outer electrode including a contact plate extending along the longitudinal direction of the pipe and being in contact with an outer circumferential surface of the pipe and a ladder section formed of bar members each having one end connected to the contact plate and juxtaposed along a longitudinal direction of the contact plate, and a leaf spring extending along the longitudinal direction of the pipe and configured to press the outer electrode against the pipe. The leaf spring may include leaf spring pieces separated by slits, and the leaf spring pieces may each include a bent section bent along the edge and are configured to press the bar members in a position shifted from the bent sections toward the edge.
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