VIBRATOR ELEMENT
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United States of America Patent
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Issued Date -
Oct 7, 2021
app pub date -
Apr 1, 2021
filing date -
Apr 3, 2020
priority date (Note) -
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Abstract
A vibrator element includes: a base; an arm that is made of silicon and continuous with the base; a silicon dioxide layer arranged on the arm and a continuous portion in which the arm and the base are continuous; a zirconium dioxide layer arranged on the silicon dioxide layer at least in the continuous portion; a first electrode arranged on the zirconium dioxide layer; a piezoelectric layer arranged on the first electrode; and a second electrode arranged on the piezoelectric layer.
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