Scanning type probe microscope and control device for scanning type probe microscope
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United States of America Patent
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Sep 27, 2022
Grant Date -
Oct 7, 2021
app pub date -
Jul 27, 2018
filing date -
Jul 27, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
A cantilever has a probe at a tip end. An optical system emits laser light to the cantilever and detects the laser light reflected by the cantilever. A measurement unit measures characteristics of a sample based on a displacement of the cantilever obtained by a change in a position of the laser light detected by the optical system. The laser light adjustment unit adjusts, when adjusting the optical axis of the laser light, a spot diameter of the laser light to be larger than the spot diameter when measuring the characteristics of a sample. The imaging unit captures an image of a range including the position of the probe when adjusting the optical axis of the laser light. The display unit displays the captured image.
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