Self-Aligning Vacuum Feed-Through for Liquid Nitrogen

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20210310717A1
SERIAL NO

17220719

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interior of the rotatable drum, and a casing to surround at least a portion of the exhaust tube. The light source also includes a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Seelinger, Sherman San Jose, US 15 1047
Wilson, Lauren San Jose, US 15 138

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