Slurry, screening method, and polishing method

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United States of America Patent

PATENT NO 12104112
APP PUB NO 20210309884A1
SERIAL NO

17263089

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A slurry containing abrasive grains and a liquid medium, in which the abrasive grains contain at least one metal compound selected from the group consisting of a metal oxide and a metal hydroxide, the metal compound contains a metal capable of taking a plurality of valences, and when the slurry is brought into contact with a surface to be polished to bring the abrasive grains into contact with the surface to be polished, the slurry yields 0.13 or more in X-ray photoelectron spectroscopy as a ratio of the lowest valence among the plurality of valences of the metal.

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Patent Owner(s)

  • RESONAC CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hasegawa, Tomoyasu Tokyo, JP 23 106
Iwano, Tomohiro Tokyo, JP 56 332
Kukita, Tomomi Tokyo, JP 20 24
Matsumoto, Takaaki Tokyo, JP 30 156
Nomura, Satoyuki Tokyo, JP 32 307

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