SCANNING PROBE MICROSCOPE AND OPTICAL AXIS ADJUSTMENT METHOD IN SCANNING PROBE MICROSCOPE
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United States of America
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Issued Date -
Sep 30, 2021
app pub date -
Dec 24, 2020
filing date -
Dec 24, 2020
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Abstract
Diffused reflection of a laser beam is prevented from adversely affecting the processing of an optical axis adjustment of the laser beam in a scanning probe microscope. In a case where a position of a spot of a laser beam identified based on an image captured by an imaging unit is moved in a direction predicted when the laser beam is moved, a control device of the scanning probe microscope sets a position of the identified spot as an initial position. The control device identifies the position that diffusely reflects the laser beam based on the image captured by the imaging unit and moves the spot from the initial position to the tip of the cantilever by avoiding the position that diffusely reflects the laser beam.
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