FAILURE ANALYSIS APPARATUS USING X-RAYS
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United States of America Patent
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Issued Date -
Sep 16, 2021
app pub date -
Mar 10, 2020
filing date -
Mar 10, 2020
priority date (Note) -
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Abstract
An apparatus is provided, which includes a source, a holder, and a conductive member. The source generates an electron beam and the holder is configured to receive a sample. The conductive member is arranged between the source and the holder at a first position or a second position. The electron beam impinges on the sample to provide a first analysis reading when the conductive member is at the first position, and the electron beam impinges on the conductive member to emanate an X-ray beam on the sample to provide a second analysis reading when the conductive member is at the second position.
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