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Patent Owner(s)

Patent Owner	Address
CYMER LLC	17075 THORNMINT COURT SAN DIEGO CA 92127

International Classification(s)

• H01S:DEVICES USING STIMULATED EMISSION
• C22C:ALLOYS

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Ramin, Leyla	San Diego, US	4	2
# of filed Patents : 4 Total Citations : 2

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Full Text

US Patent Application No: 2021/0257,797

PROLONGED LIFE LASER CHAMBER ELECTRODE AND LASER HAVING SAME

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Abstract

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Disclosed is an electrode for a laser chamber comprising an alloy of a first metal having a first free energy of formation with fluorine greater than or equal to the free energy of formation with fluorine of copper, and a second metal having a second free energy of formation with fluorine less than the first free energy.

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Description

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