LI-ION THIN FILM MICROBATTERY AND METHOD OF FABRICATING THE SAME
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United States of America Patent
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Aug 19, 2021
app pub date -
Feb 26, 2021
filing date -
Jul 29, 2016
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Abstract
A Li-ion thin film microbattery, a microbattery array, a method of fabricating a Li-ion thin film microbattery and a method of fabricating a microbattery array. The Li-ion thin film microbattery comprises a Li-free cathode comprising a transition metal oxide thin film; an anode comprising a lithiated Ge or Si thin film; and an electrolyte film disposed between the cathode and the anode; wherein a Li-source of the Li-ion thin film microbattery is provided by means of the lithiated Ge or Si thin film.
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