Two-Stage Ion Source Comprising Closed and Open Ion Volumes
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Jul 29, 2021
app pub date -
May 8, 2019
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May 11, 2018
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An ion source includes a base, a first chamber, a second chamber and an extractor. The first chamber is disposed downstream of the base and defines a first internal volume having a first pressure. The second chamber is disposed downstream of the first chamber and defines a second internal volume having a second pressure. The second pressure is less than the first pressure. The repeller electrode is disposed within the first chamber. The extractor is disposed downstream of the second chamber.
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