RETICLE STAGE FOR PREVENTING HAZE CONTAMINATION AND EXPOSURE APPARATUS HAVING THE SAME
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United States of America Patent
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Issued Date -
Jul 8, 2021
app pub date -
Jan 7, 2020
filing date -
Jan 7, 2020
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Abstract
A reticle stage for holding a reticle assembly is provided. The reticle assembly has a reticle and a pellicle covering the reticle. The reticle stage includes a reticle stage base, a reticle holder disposed on the reticle stage base and for holding the reticle assembly over the reticle stage base, and an electrostatic generator coupled to the reticle assembly. The electrostatic generator is configured to generate static electricity to the reticle assembly. The static electricity alternates between positive electricity and negative electricity.
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