Mask blank, phase-shift mask, and method of manufacturing semiconductor device

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United States of America Patent

PATENT NO 11442357
APP PUB NO 20210208497A1
SERIAL NO

17058631

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Abstract

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Provided is a mask blank, including a phase shift film. The phase shift film has a structure where a first layer and a second layer are stacked in this order from a side of the transparent substrate. The first layer is provided in contact with a surface of the transparent substrate. Refractive indexes n1 and n2 of the first layer and the second layer, respectively, at a wavelength of an exposure light of an ArF excimer laser satisfy the relation n12. Extinction coefficients k1 and k2 of the first layer and the second layer, respectively, at a wavelength of the exposure light satisfy the relation k12. Film thicknesses d1 and d2 of the first layer and the second layer, respectively, satisfy the relation d12.

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Patent Owner(s)

Patent OwnerAddress
HOYA CORPORATION6-10-1 NISHI-SHINJUKU SHINJUKU-KU SHINJUKU-KU TOKYO 160-8347

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hashimoto, Masahiro Tokyo, JP 99 970
Maeda, Hitoshi Tokyo, JP 64 364
Shishido, Hiroaki Tokyo, JP 102 766

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