Control method for piezoelectric drive device, piezoelectric drive device, and robot
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United States of America Patent
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Nov 29, 2022
Grant Date -
Jun 24, 2021
app pub date -
Dec 18, 2020
filing date -
Dec 20, 2019
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Abstract
A control method for a piezoelectric drive device includes a first step of executing first control to decrease a frequency of a drive voltage applied to a piezoelectric vibrator from a predetermined first frequency while acquiring a pickup voltage representing vibration amplitude of the piezoelectric vibrator, and a second step of executing second control to increase the frequency of the drive voltage applied to the piezoelectric vibrator to a second frequency as a frequency of the drive voltage applied before a second time when the pickup voltage is higher from a first time to the second time and the pickup voltage is lower from the second time to a third time.
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