Vapor phase epitaxy method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11859310
APP PUB NO 20210193465A1
SERIAL NO

17129737

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A vapor phase epitaxy method of growing a III-V layer with a doping that changes from a first conductivity type to a second conductivity type on a surface of a substrate or a preceding layer in a reaction chamber from the vapor phase from an epitaxial gas flow comprising a carrier gas, at least one first precursor for an element from main group III, and at least one second precursor for an element from main group V, wherein when a first growth height is reached, a first initial doping level of the first conductivity type is set by means of a ratio of a first mass flow of the first precursor to a second mass flow of the second precursor in the epitaxial gas flow, the first initial doping level is then reduced to a second initial doping level of the first or low second conductivity type.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
AZUR SPACE SOLAR POWER GMBH74072 HEILBRONN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fuhrmann, Daniel Heilbronn, DE 42 67
Keller, Gregor Heilbronn, DE 14 5
Waechter, Clemens Lauffen am Neckar, DE 15 9

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jul 2, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Jul 2, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jul 2, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00