Method and system for testing an integrated circuit
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United States of America Patent
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Sep 7, 2021
Grant Date -
Jun 24, 2021
app pub date -
Dec 23, 2019
filing date -
Dec 23, 2019
priority date (Note) -
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Abstract
A method for analyzing an integrated circuit includes: applying an electric test pattern to the IC; delivering a stream of primary electrons to a back side of the IC on an active region to a transistor of interest, the active region including active structures such as transistors of the IC; detecting light resulting from cathodoluminescence initiated by secondary electrons in the IC; and analyzing the detected light regarding a correlation with the electric test pattern applied to the IC. A system for analyzing an IC is provided.
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