Station and method for measuring airborne molecular contamination
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United States of America Patent
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Sep 26, 2023
Grant Date -
Jun 24, 2021
app pub date -
May 21, 2019
filing date -
May 28, 2018
priority date (Note) -
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Abstract
A station for measuring airborne molecular contamination includes: at least one gas analyser; a conditioning pump; and a sequencing unit including a sequencing program defining an order for the measurements to be performed for at least two sampling lines, the sequencing unit being configured to control the connection of a sampling line to be measured, the measurement of which is programmed to follow that of a sampling line being measured, with the conditioning pump, while controlling the connection of the sampling line being measured with the at least one gas analyser. A method for measuring airborne molecular contamination using such a station is also disclosed.
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