Reticle processing system

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United States of America Patent

PATENT NO 11940724
APP PUB NO 20210173295A1
SERIAL NO

17110514

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Provided herein are apparatus, systems and methods for processing reticle blanks. A reticle processing system includes a support assembly having a plate coupled to a frame, and a carrier base assembly supported on the support assembly. The carrier base assembly comprises a wall extending from a top surface of the carrier base and defining a containment region for a reticle.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhat, Sanjay Singapore, SG 41 959
Jindal, Vibhu San Jose, US 83 312

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