HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS
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United States of America Patent
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May 27, 2021
app pub date -
Nov 13, 2020
filing date -
May 19, 2018
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System and methods for a hollow-disk radial-contour mode resonator structure. The hollow disk reduces the dynamic mass and stiffness of the structure. Since electromechanical coupling Cx/Co goes as the reciprocal of mass and stiffness, the hollow disk structure has a considerably stronger electromechanical coupling than a solid one at the same frequency, and thus raises Cx/Co without excessive gap-scaling. Several embodiments of hollow disk resonators are detailed, including asymmetric and symmetric disk configurations.
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