RESONANCE DEVICE AND MANUFACTURING METHOD OF RESONANCE DEVICE
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United States of America Patent
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May 20, 2021
app pub date -
Jan 29, 2021
filing date -
Sep 28, 2018
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Abstract
A resonance device that includes a MEMS substrate including a resonator, an upper lid, and a bonding portion bonding the MEMS substrate and the upper lid to seal a vibration space of the resonator. The bonding portion includes a eutectic layer containing a eutectic alloy as a main component thereof. The eutectic alloy is composed of a first metal containing aluminum as a main component thereof, a second metal of germanium or silicon, and a third metal of titanium or nickel.
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