Acoustic transducers having non-circular perimetral release holes
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United States of America Patent
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Oct 18, 2022
Grant Date -
May 6, 2021
app pub date -
Oct 27, 2020
filing date -
Nov 6, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
An acoustic transducer comprises a transducer substrate having an aperture defined therethrough. At least one diaphragm is disposed on the transducer substrate over the aperture. A back plate is disposed on the transducer substrate and axially spaced apart from the at least one diaphragm. A perimetral support structure is disposed circumferentially between the at least one diaphragm and the back plate at a radially outer perimeter of the back plate. A plurality of perimetral release holes are defined circumferentially through at least one of the at least one diaphragm or the back plate proximate to and radially inwards of the perimetral support structure, at least a portion of the plurality of perimetral release holes defining a non-circular shape.
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