MICRODEVICE COMPRISING AT LEAST TWO MOVABLE ELEMENTS
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United States of America Patent
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Issued Date -
May 6, 2021
app pub date -
Mar 14, 2018
filing date -
Mar 16, 2017
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Abstract
A microdevice (100) comprising a movable element (111) capable of moving relative to a fixed part (115), produced in first and second layers of material (104, 106) arranged one above the other such that the movable element comprises a portion (112) of the first layer and a portion (118) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure (121) formed in the first and/or second layer of material.
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