In situ polymerization of para-xylene for production of parylene F-like coating

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United States of America Patent

PATENT NO 11938512
APP PUB NO 20210129180A1
SERIAL NO

16673810

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Abstract

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A method for depositing coating onto a substrate includes providing a monomer for creation of a protective coating on a substrate, energizing the monomer with a plasma generation system, and polymerizing the energized monomer onto the substrate in a plasma-enhanced chemical vapor deposition (PECVD) chamber.

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Patent Owner(s)

Patent OwnerAddress
HZO INC12637 SOUTH 265 WEST DRAPER UT 84020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clancy, Sean Apex, US 12 16
Janik, John Raleigh, US 19 310
Lawrence, Benjamin Salt Lake City, US 8 3

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