COMBINATION PARYLENE SYSTEM FOR PRE-TREATMENT, DEPOSITION, POST-TREATMENT AND CLEANING
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United States of America Patent
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May 6, 2021
app pub date -
Oct 30, 2019
filing date -
Oct 30, 2019
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Abstract
A deposition system includes a multipurpose deposition chamber, a pre-treatment source and a post-treatment source. The multipurpose deposition chamber is configured to deposit parylene on a plurality of electronic devices. The multipurpose deposition chamber is configured to process pre-treatment of the plurality of electronic devices prior to deposition of the parylene. The multipurpose deposition chamber is configured to process post-treatment of the plurality of electronic devices after deposition of the parylene.
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