OPTICAL PROBE, OPTICAL PROBE ARRAY, TEST SYSTEM AND TEST METHOD
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United States of America
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Sep 30, 2020
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Sep 30, 2020
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Abstract
An optical probe receives an optical signal output from a test subject. The optical probe includes an optical waveguide composed of a core portion and a cladding portion disposed on an outer periphery of the core portion, wherein an incident surface of the optical waveguide, which receives the optical signal, is a convex spherical surface with a constant curvature radius.
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