Fluid Control Device and Sensor Holding Member
Number of patents in Portfolio can not be more than 2000
United States of America
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app pub date -
Mar 22, 2018
filing date -
Mar 22, 2018
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Abstract
A fluid control device is provided in which a temperature sensor is firmly fixed and the thermal contact of the temperature sensor with the inner circumferential surface of a leak port is reliably maintained. A fluid control device 3 holding a temperature sensor 7 has the temperature sensor 7 inserted into a leak port LP and a sensor holding member 8 provided directly above the leak port LP and holding the temperature sensor 7 in a state in which the temperature sensor 7 is inserted into the inside of the leak port LP. The sensor holding member 8 is formed of a base body part 81 disposed directly above the leak port LP and a through hole 8a provided on the base body part 81, the temperature sensor 7 being inserted into the through hole 8a, the through hole 8a communicating with the leak port LP. The base body part 81 has a length that fits in the width of the fluid control device 3 in the short-side direction. The through hole 8a of the sensor holding member 8 and the leak port LP form a predetermined angle.
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