Importance

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Abstract

The present invention relates to a micro-optomechanical system (500) and to a method for the production thereof. The micro-optomechanical system (500) comprises

at least one optical subsystem (100) configured for emitting at least one optical actuator signal (212) and for receiving at least one optical sensor signal (211); andat least one optomechanical structure (150) which is producible in direct contact with the optical subsystem (100) by means of a direct writing microstructuring method, wherein the optical subsystem (100) comprises at least one optical actuation element (219) and at least one optical sensor element (140), wherein the optical actuator signal (212) in interaction with the optical actuation element (219) is configured for changing a mechanical state of the optomechanical structure (150), and wherein the optical sensor signal (211) in interaction with the optical sensor element (140) is configured for detecting the change in the mechanical state of the optomechanical structure (150) or a variable related thereto.

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First Claim