Piezoelectric Drive Device And Robot
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United States of America Patent
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Issued Date -
Mar 4, 2021
app pub date -
Aug 26, 2020
filing date -
Aug 27, 2019
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Abstract
A piezoelectric drive device includes a vibrating part which has a piezoelectric element, and drives a driven part using the piezoelectric element, and a first plate spring part configured to bias the vibrating part in a first direction from the vibrating part toward the driven part. The first plate spring part extends toward a second direction crossing the first direction, the first plate spring part is disposed so as to be opposed to the vibrating part in a third direction perpendicular to the first direction and the second direction, and when dividing the first plate spring part into a first portion and a second portion farther from the vibrating part than the first portion so that a length along the third direction is equally divided, a volume of the second portion is larger than a volume of the first portion.
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