Scanning probe microscope and analysis method
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United States of America Patent
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Aug 16, 2022
Grant Date -
Feb 25, 2021
app pub date -
Jan 29, 2018
filing date -
Jan 29, 2018
priority date (Note) -
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Abstract
A scanning probe microscope 1 is provided with a control unit 15. The control unit 15 includes a signal acquisition processing unit 151, an image acquisition processing unit 152, a scanning condition change processing unit 154, a scanning processing unit 155, and a noise determination processing unit 156. In the scanning probe microscope 1, when removing noise included in a surface image of a sample, the scanning condition change processing unit 154 changes a scanning condition. And, the signal acquisition processing unit 151 acquires an output signal from a detection unit 12. The image acquisition processing unit 152 acquires a surface image of a sample S based on the output signal. The noise determination processing unit 156 determines whether or not noise is inclined in the output signal contains noise based on the change in the output signal or the change in the surface image of the sample S when the scanning condition is changed by the scanning condition change processing unit 154. Therefore, if noise is included in the output signal, it is possible to correctly determinate the fact.
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