Optical element having metallic seed layer and aluminum layer, and method for producing same

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United States of America Patent

PATENT NO 11466356
APP PUB NO 20210047719A1
SERIAL NO

16994526

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Abstract

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A method for producing an aluminum layer is provided. The method includes depositing a metallic seed layer on a substrate, the seed layer having a thickness of not more than 5 nm, and also includes applying the aluminum layer to the seed layer, wherein the aluminum layer has a thickness of more than 30 nm. Further, an optical element, which can be a mirror layer, is provided including the metallic seed layer and the aluminum layer.

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Patent Owner(s)

Patent OwnerAddress
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E VHANSASTRASSE 27C MUNICH 80686
FRIEDRICH-SCHILLER-UNIVERSITAT JENA07743 JENA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gäbler, Dieter Jena, DE 1 0
Munzert, Peter Jena, DE 20 131
Schmitt, Paul Jena, DE 53 774
Schwinde, Stefan Jena, DE 3 8
Stempfhuber, Sven Jena, DE 1 0

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