Electrostatic actuator and physical quantity sensor

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United States of America Patent

PATENT NO 11846651
APP PUB NO 20210041475A1
SERIAL NO

17082199

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Abstract

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An electrostatic actuator includes a fixed electrode and a movable electrode arranged to face the fixed electrode. The movable electrode is configured to be displaceable with respect to the fixed electrode and a fixed portion. An attractive force acts between the movable electrode and the fixed portion. In the electrostatic actuator, a non-linear vibration of the movable electrode when a voltage is applied to the fixed electrode and the movable electrode is reduced by the attractive force acting between the movable electrode and the fixed portion.

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Patent Owner(s)

Patent OwnerAddress
DENSO CORPORATIONKARIYA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akashi, Teruhisa Kariya, JP 40 260
Harada, Shota Kariya, JP 17 22
Hata, Yoshiyuki Kariya, JP 29 148
Inagaki, Yuuki Kariya, JP 12 13
Ito, Keitaro Kariya, JP 13 12
Jomori, Tomoya Kariya, JP 15 54
Yamada, Hideo Kariya, JP 80 1094

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