Vapor shield replacement system and method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11398393
APP PUB NO 20210035829A1
SERIAL NO

17074105

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Abstract

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A multi-shield plate includes a plate having a substantially flat upper surface and a substantially flat lower surface, a plurality of first windows formed in the plate and extending through the plate from the upper surface to the lower surface, and a plurality of vapor shields mounted to the plate, each vapor shield of the plurality of vapor shields configured to prevent passage of a vapor through a corresponding window of the plurality of windows. The multi-shield plate includes an aperture formed in the plate, the aperture aligned with a first window of the plurality of windows along an axis corresponding to the upper surface.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ho, Monica Hsinchu, TW 4 18
Lien, Wen-Cheng Hsinchu, TW 10 26
Lin, Chun-Chih Taipei, TW 55 80
Lin, Ping-Tse Hsinchu, TW 5 1

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