Electro-optical circuit board for contacting photonic integrated circuits

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United States of America Patent

PATENT NO 11946950
APP PUB NO 20210033643A1
SERIAL NO

17062954

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Abstract

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An electro-optical circuit board can provide probe card functionality. The electro-optical circuit board includes at least one electrical conductor track and at least one optical beam path.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huebner, Philipp Hamburg, DE 4 19
Richter, Stefan Jena, DE 91 928

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