Flow controller
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United States of America Patent
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Sep 13, 2022
Grant Date -
Jan 21, 2021
app pub date -
Mar 12, 2019
filing date -
Mar 26, 2018
priority date (Note) -
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Abstract
In a flow controller comprising a base with a gas passage formed inside, a flow sensor which measures a flow rate of the gas flowing through the passage, and at least two flow control valves which control the flow rate of the gas flowing through the passage, the flow sensor is configured so as to detect a total flow rate of the gas flowing through the passage, a part in the middle of the passage is branched into at least two branch passages, and at least one of said flow control valves is interposed in each of these branch passages. Thereby, even when a pressure difference ΔP1 between a primary side pressure P1 and a secondary side pressure P2 cannot be increased, the maximum flow rate of the gas can be made larger than before.
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