Beam-forming and illuminating system for a lithography system, lithography system, and method

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United States of America Patent

PATENT NO 11448968
APP PUB NO 20210003925A1
SERIAL NO

17019931

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Abstract

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A beam-forming and illuminating system for a lithography system, such an EUV lithography system, includes an optical element and an adjusting device. The adjusting device is configured so that, during a heat-up phase of the beam-forming and illuminating system, the adjusting device measures a field position and/or a pupil position of the beam-forming and illuminating system and adjusts the orientation and/or position of the optical element based on the measured field position and/or pupil position to keep the optical element in a desired position.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STR 2 73447 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abele, Klaus Schwäbisch-Gmünd Hussenhofen, DE 5 66
Holderer, Hubert Oberkochen, DE 72 1034
Liebaug, Björn Ulm, DE 2 0

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