X-RAY STRESS MEASUREMENT DEVICE
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United States of America Patent
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Jan 7, 2021
app pub date -
Jul 2, 2019
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Jul 2, 2019
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Abstract
An X-ray generator 110 irradiates with an X-ray beam onto a polycrystalline sample on a sample stage 113. An X-ray detector 116 including an array of X-ray detecting elements detects the intensities of diffracted X-rays which occur from the X-ray beam incident on the sample. A rotary drive rotates the X-ray generator, X-ray detector and sample-holding section so as to maintain a predetermined relationship between the angle formed by the sample surface and the incident X-ray beam, and the angle formed by the sample surface and the diffracted X-ray travelling toward the X-ray detector. A stress measurement section rotates, for a measurement of a stress value of the sample, either the X-ray generator and the X-ray detector or the sample stage so as to change the angle formed by the sample surface and the incident X-ray beam, while maintaining the positional relationship of the X-ray generator and the X-ray detector.
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