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Abstract

Described herein is a method for manufacturing, or for use in manufacturing a flexible ultrasonic transducer array and the resultant ultrasonic transducer array. The method includes providing a layer of piezoelectric material onto a foil substrate and using additive techniques to apply at least one electrode to a surface of the piezoelectric material such that the electrodes are arranged in an electrode array. The method also includes using the additive techniques to applying a plurality of electrical conduction tracks and a plurality of electrical connectors to the surface of the piezoelectric material or to a layer of dielectric material provided on the surface of the piezoelectric material, such that respective electrical conduction tracks electrically connect a respective electrode to a respective electrical connector. The additive techniques comprise at least one of: masking, deposition, photo patterning, printing or patterned coating. Optionally layer of piezoelectric material comprises a layer of inorganic piezoelectric material that has been deposited onto the foil.

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First Claim