SCANNING ELECTRON MICROSCOPE
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United States of America Patent
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Issued Date -
Dec 24, 2020
app pub date -
Aug 31, 2020
filing date -
Sep 17, 2018
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Abstract
A scanning electron microscope. The scanning electron microscope may include a sliding vacuum seal between the electron optical imaging system and the sample carrier with a first plate having a first aperture associated with the electron optical imaging system and resting against a second plate having a second aperture associated with the sample carrier. The first plate and/or the second plate includes a groove circumscribing the first and/or second aperture. The scanning electron microscope may include a detector movable relative to the electron beam. The scanning electron microscope may include a motion control unit for moving a sample carrier along a collision free path.
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