Measuring device for a scanning probe microscope and method for scanning probe microscopy of a measurement sample by means of a scanning probe microscope
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United States of America Patent
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Oct 26, 2021
Grant Date -
Dec 24, 2020
app pub date -
Jun 17, 2020
filing date -
Jun 18, 2019
priority date (Note) -
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Abstract
A measuring device for a scanning probe microscope including a sample receptacle configured to receive a sample; a measuring probe which is arranged on a probe holder and has a probe tip; a displacement device which moves the measuring probe and the sample receptacle relative to each other; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device which is configured to detect, movement measurement signals during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle. The movement measurement signals are relayed to the control device. The control device is configured to control the relative movement. The invention also provides a scanning probe microscope, as well as a method for examining a sample.
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