POLISHING COMPOSITION AND POLISHING METHOD

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United States of America Patent

APP PUB NO 20200392376A1
SERIAL NO

17005857

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a solution for preventing the settling of an abrasive while maintaining the polishing performance. In addition, the present invention provides a solution for improving the redispersibility of an abrasive while maintaining the polishing performance.

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Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATED1-1 CHIRYO 2-CHOME NISHIBIWAJIMA-CHO KIYOSU-SHI AICHI 4528502 ?4528502

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ISHIBASHI, Tomoaki Kiyosu-shi, JP 8 68
KON, Hiroki Kiyosu-shi, JP 8 13

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