RADIO FREQUENCY AND IMPINGEMENT PROCESSING APPARATUS AND METHOD
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United States of America Patent
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Issued Date -
Dec 17, 2020
app pub date -
Oct 1, 2018
filing date -
Sep 29, 2017
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Abstract
A system includes a first unit configured to generate and apply radio frequency (RF) energy to a load positioned in the first unit during a first time period, wherein the load is at a first temperature at a start of the first time period and at a second temperature different from the first temperature at an end of the first time period; and a second unit configured to receive the load at the second temperature and to cause heat transfer by impingement to the load during a second time period different from the first time period, wherein the load is at a third temperature at an end of the second time period. A processing yield associated with the load is higher than if the load undergoes impingement processing to change from the first temperature to the third temperature.
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