PRESSURE SENSOR ARRANGEMENT, MEASURING DEVICE AND METHOD FOR THE PRODUCTION THEREOF
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United States of America Patent
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Issued Date -
Dec 10, 2020
app pub date -
Jul 20, 2018
filing date -
Jul 26, 2017
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Abstract
A pressure sensor system having at least one pressure sensor device. The pressure sensor device has a stack having a ceramic substrate, at least one signal processing element, and at least one sensor element. The pressure sensor device is placed in a sensor housing provided with a membrane, and a residual volume of the sensor housing provided with the membrane is filled with an incompressible fluid. A method for producing such a pressure sensor system, and to a measuring device, are also described.
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