Plasma etching method

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United States of America Patent

PATENT NO 11120999
APP PUB NO 20200381264A1
SERIAL NO

16770084

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Abstract

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A plasma etching method includes a physisorption step for causing an adsorbate that is based on first processing gas to be physisorbed onto a film to be etched, while cooling an object to be processed on which the film to be etched is provided; and an etching step for etching the film to be etched by causing the adsorbate to react with the film to be etched, using the plasma of second processing gas.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO JAPAN
UNIVERSITE D'ORLEANS45100 ORLÉANS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Antoun, Gaëlle Dardilly, FR 3 0
Dussart, Remi Saint-Mesmin, FR 6 11
Faguet, Jacques Austin, US 52 4097
Lefaucheux, Philippe Mareau-aux-pres, FR 4 10
Maekawa, Kaoru Albany, US 41 533
Ono, Kumiko Tokyo, JP 11 41
Sato, Nagisa Tokyo, JP 9 6
Tahara, Shigeru Miyagi, JP 57 885
Tillocher, Thomas Orleans, FR 5 11
Yatsuda, Koichi Tokyo, JP 29 817

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