Method of manufacturing a stacked piezoelectric transducer, and piezoelectric transducer

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United States of America Patent

PATENT NO 11433669
APP PUB NO 20200369029A1
SERIAL NO

16879269

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Abstract

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A piezoelectric transducer includes a semiconductor body with a bottom electrode of conductive material. A piezoelectric element is on the bottom electrode. A first protective layer, on the bottom electrode and the piezoelectric element, has a first opening through which a portion of the piezoelectric element is exposed, and a second opening through which a portion of the bottom electrode is exposed. A conductive layer on the first protective layer and within the first and second openings is patterned to form a top electrode in electrical contact with the piezoelectric element at the first opening, a first biasing stripe in electrical contact with the top electrode, and a second biasing stripe in electrical contact with the bottom electrode at the second opening.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R L20864 AGRATE BRIANZA (MB)

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Assanelli, Davide Milan, IT 4 1
Ferrarini, Paolo Casatenovo, IT 4 28
Lazzari, Carla Maria Casatenovo, IT 7 16
Martini, Irene Bergamo, IT 9 22
Vinciguerra, Lorenzo Novara, IT 3 1

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