Vibration substrate having a pair of holding portions and a beam portion connecting the holding portions, vibrator, and vibrator unit
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United States of America Patent
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-
Nov 21, 2023
Grant Date -
Nov 19, 2020
app pub date -
Jul 27, 2020
filing date -
Feb 28, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
The vibration substrate having a main surface extending parallel to a first direction and a second direction that are orthogonal to each other, and that includes a main body region having a vibrating portion at least in a part thereof and at least one holding region arranged side by side with the main body region along the first direction. The at least one holding region including a holding portion and a beam portion connecting the holding portion and the main body region. The beam portion includes a first arm portion extending from the holding portion along the first direction, a second arm portion extending along the second direction from an end portion of the first arm portion on a side thereof opposite to the holding portion, and a connection portion connecting the second arm portion and the main body region.
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