Chromatic Confocal System and method for inspecting an object
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United States of America Patent
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Nov 19, 2020
app pub date -
May 17, 2019
filing date -
May 17, 2019
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Abstract
The invention provides a chromatic confocal system for inspecting an object. The system comprises a first light modulator for providing a spatially modulated light beam arranged to project on one or more parts of the object to form a reflected light beam carrying image information of the one or more projected parts of the object; a second light modulator for spatially filtering the reflected light beam to form a light beam carrying filtered image information of the one or more projected parts of the object; wherein operation of the first light modulator and the second light modulator is synchronized such that the spatial filtering of the second light modulator varies in concert with variations in the spatial modulation of the first light modulator.
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